Diamond-like carbon films deposited by electron beam excited plasma chemical vapor deposition

Masahito Ban; Makoto Ryoji; Takeshi Hasegawa; Yukitaka Mori; Sadao Fujii; Junzo Fujioka

doi:10.1016/s0925-9635(01)00743-9

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Diamond-like carbon films deposited by electron beam excited plasma chemical vapor deposition

Masahito Ban Makoto Ryoji Takeshi Hasegawa Yukitaka Mori Sadao Fujii Junzo Fujioka

Year: 2002 Journal: Diamond and Related Materials Vol: 11 (7)Pages: 1353-1359 Publisher: Elsevier BV

DOI: 10.1016/s0925-9635(01)00743-9

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Keywords:

Diamond-like carbon Chemical vapor deposition Electron beam physical vapor deposition Substrate (aquarium) Materials science Carbon film Diamond Deposition (geology) Carbon fibers Plasma-enhanced chemical vapor deposition Plasma Biasing Analytical Chemistry (journal) Microstructure Hydrogen Thin film Chemistry Nanotechnology Composite material Voltage

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Diamond-like carbon films deposited by electron beam excited plasma chemical vapor deposition

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