JOURNAL ARTICLE

Mechanical and Tribological Properties of Diamond-Like Carbon Films Deposited by Electron Cyclotron Resonance Microwave Plasma Chemical Vapor Deposition

Jun QiJianbin LuoKunlin WangShizhu Wen

Year: 2003 Journal:   Tribology Letters Vol: 14 (2)Pages: 105-109   Publisher: Springer Science+Business Media
Keywords:
Materials science Nanoindentation Tribology Scratch Electron cyclotron resonance Burnishing (metal) Composite material Residual stress Scratching Diamond-like carbon Friction coefficient Diamond Thin film Plasma Nanotechnology Polishing

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7
Cited By
0.20
FWCI (Field Weighted Citation Impact)
12
Refs
0.48
Citation Normalized Percentile
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Citation History

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Tribology and Wear Analysis
Physical Sciences →  Engineering →  Mechanics of Materials

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