JOURNAL ARTICLE
Fluorinated amorphous diamond-like carbon films deposited by plasma-enhanced chemical vapor deposition
Guoqing YuBeng Kang TayZhen Sun
Year: 2004 Journal: Surface and Coatings Technology Vol: 191 (2-3)Pages: 236-241 Publisher: Elsevier BV
Keywords:
Materials science X-ray photoelectron spectroscopy Chemical vapor deposition Carbon film Plasma-enhanced chemical vapor deposition Microstructure Amorphous carbon Carbon fibers Amorphous solid Raman spectroscopy Diamond Analytical Chemistry (journal) Chemical engineering Diamond-like carbon Thin film Nanotechnology Composite material Composite number Organic chemistry Chemistry Optics
Metrics
42
Cited By
1.41
FWCI (Field Weighted Citation Impact)
22
Refs
0.80
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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