Characterization of Diamond-like carbon films produced by electron- beam physical vapor deposition

Abstract

Diamond-like carbon (DLC) films were deposited at 300 °C, 400 °C and 500 °C on 304 L stainless steel substrates by electron-beam physical vapor deposition. The obtained coatings were characterized by Fourier Transform Infrared Spectroscopy (FTIR), Raman Spectroscopy and X-ray photo electron spectroscopy (XPS). The FTIR results demonstrate the presence of sp3 and sp2 vibrations corresponding to a diamond-like carbon phase and graphite, respectively. Raman and XPS analysis confirm a presence of high quantity of CC bonds in sp3 state in the deposited DLC films. Increasing the substrate temperature from 300 °C to 500 °C led to a decreasing of the hardness from 4.5 GPa to 3.2 GPa.