Superhard and tougher SiC/diamond-like-carbon composite films produced by electron beam physical vapour deposition

Xiaofeng Zhao; Xin He; Yue Sun; Yi Jiang; Ping Xiao

doi:10.1016/j.actamat.2008.10.031

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Superhard and tougher SiC/diamond-like-carbon composite films produced by electron beam physical vapour deposition

Xiaofeng Zhao Xin He Yue Sun Yi Jiang Ping Xiao

Year: 2008 Journal: Acta Materialia Vol: 57 (3)Pages: 893-902 Publisher: Elsevier BV

DOI: 10.1016/j.actamat.2008.10.031

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Keywords:

Materials science Nanoindentation Composite material Nanocrystalline material Microstructure Diamond Composite number Chemical vapor deposition Diamond-like carbon Fracture toughness Carbon film Carbon fibers Substrate (aquarium) Thin film Nanotechnology

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Superhard and tougher SiC/diamond-like-carbon composite films produced by electron beam physical vapour deposition

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