Hard diamond-like carbon films prepared by various physical vapour deposition techniques

J.Ph. Nabot; B. André; Jacqueline Chabert

doi:10.1016/0257-8972(91)90243-p

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Hard diamond-like carbon films prepared by various physical vapour deposition techniques

J.Ph. Nabot B. André Jacqueline Chabert

Year: 1991 Journal: Surface and Coatings Technology Vol: 45 (1-3)Pages: 359-367 Publisher: Elsevier BV

DOI: 10.1016/0257-8972(91)90243-p

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Keywords:

Materials science Diamond-like carbon Sputtering Carbon film Analytical Chemistry (journal) Carbon fibers Sputter deposition Ion beam Ion beam-assisted deposition Graphite Ion Inert gas Amorphous carbon Deposition (geology) Argon Silicon Physical vapor deposition Amorphous solid Thin film Composite material Nanotechnology Metallurgy Atomic physics Crystallography Chemistry Composite number

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Hard diamond-like carbon films prepared by various physical vapour deposition techniques

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