Surface roughness of diamond-like carbon films prepared using various techniques

Xiaoyu Peng; Z. H. Barber; T.W. Clyne

doi:10.1016/s0257-8972(00)01139-7

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Surface roughness of diamond-like carbon films prepared using various techniques

Xiaoyu Peng Z. H. Barber T.W. Clyne

Year: 2001 Journal: Surface and Coatings Technology Vol: 138 (1)Pages: 23-32 Publisher: Elsevier BV

DOI: 10.1016/s0257-8972(00)01139-7

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Keywords:

Materials science Surface roughness Sputter deposition Surface finish Sputtering Graphite Diamond-like carbon Analytical Chemistry (journal) Diamond Silicon Glow discharge Substrate (aquarium) Nanotechnology Composite material Plasma Thin film Optoelectronics Chemistry

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Surface roughness of diamond-like carbon films prepared using various techniques

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Citation History

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