BOOK
Laser Heat-Mode Lithography
Year: 2019 Springer series in materials science Publisher: Springer Science+Business Media
Keywords:
Lithography Maskless lithography Next-generation lithography Materials science X-ray lithography Resist Extreme ultraviolet lithography Laser Mode (computer interface) Computational lithography Stencil lithography Photolithography Optics Nanotechnology Optoelectronics Electron-beam lithography Computer science Physics
Metrics
11
Cited By
0.64
FWCI (Field Weighted Citation Impact)
6
Refs
0.86
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Laser Design and Applications
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced optical system design
Physical Sciences → Engineering → Biomedical Engineering
Advanced Measurement and Metrology Techniques
Physical Sciences → Engineering → Mechanical Engineering
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