BOOK-CHAPTER
Principles of Laser Heat-Mode Lithography
Year: 2019 Springer series in materials science Pages: 27-47 Publisher: Springer Science+Business Media
Keywords:
Photolithography Photoresist Lithography Optoelectronics Materials science Computational lithography Optics Laser X-ray lithography Light energy Energy (signal processing) Energy transfer Feature (linguistics) Nanotechnology Resist Physics Engineering physics
Metrics
1
Cited By
0.43
FWCI (Field Weighted Citation Impact)
27
Refs
0.65
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Phase-change materials and chalcogenides
Physical Sciences → Materials Science → Materials Chemistry
Photonic and Optical Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Nonlinear Optical Materials Studies
Physical Sciences → Engineering → Biomedical Engineering
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