BOOK
Laser Heat-Mode Lithography : Principle and Methods
Keywords:
Laser Mode (computer interface) Materials science Lithography Extreme ultraviolet lithography Optics Optoelectronics Computer science Physics
Metrics
7
Cited By
1.01
FWCI (Field Weighted Citation Impact)
0
Refs
0.80
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Laser Material Processing Techniques
Physical Sciences → Engineering → Computational Mechanics
Advanced Measurement and Metrology Techniques
Physical Sciences → Engineering → Mechanical Engineering
Advanced optical system design
Physical Sciences → Engineering → Biomedical Engineering
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