Laser Heat-Mode Grayscale Lithography

BOOK-CHAPTER

Year: 2019 Springer series in materials science Pages: 169-189 Publisher: Springer Science+Business Media

DOI: 10.1007/978-981-15-0943-8_8

Keywords:

Materials science Laser Thin film Optoelectronics Lithography Grayscale Crystallization Optics Composite material Nanotechnology Chemical engineering

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Phase-change materials and chalcogenides

Physical Sciences → Materials Science → Materials Chemistry

Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Nonlinear Optical Materials Studies

Physical Sciences → Engineering → Biomedical Engineering