Keywords:
Materials science Lithography Optoelectronics

Metrics

0
Cited By
0.00
FWCI (Field Weighted Citation Impact)
0
Refs
0.49
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Advancements in Photolithography Techniques
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials

Related Documents

JOURNAL ARTICLE

Thick-film lithography using laser write

Yao ChengTzu‐Hsuan HuangChing‐Chang Chieng

Journal:   Microsystem Technologies Year: 2002 Vol: 9 (1-2)Pages: 17-22
BOOK-CHAPTER

Thick Resist Lithography

Clifford L. Henderson

Year: 2015 Pages: 3319-3327
BOOK-CHAPTER

Thick Resist Lithography

Clifford L. Henderson

Year: 2008 Pages: 2073-2079
BOOK-CHAPTER

Thick Resist Lithography

Clifford L. Henderson

Year: 2014 Pages: 1-9
© 2026 ScienceGate Book Chapters — All rights reserved.