Thick-film lithography using laser write

Yao Cheng; Tzu‐Hsuan Huang; Ching‐Chang Chieng

doi:10.1007/s00542-002-0201-y

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Thick-film lithography using laser write

Yao Cheng Tzu‐Hsuan Huang Ching‐Chang Chieng

Year: 2002 Journal: Microsystem Technologies Vol: 9 (1-2)Pages: 17-22 Publisher: Springer Science+Business Media

DOI: 10.1007/s00542-002-0201-y

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Keywords:

Lithography Materials science Laser Maskless lithography Extreme ultraviolet lithography Optics Optoelectronics Nanotechnology Resist Physics Electron-beam lithography

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Advancements in Photolithography Techniques

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Advanced X-ray Imaging Techniques

Physical Sciences → Physics and Astronomy → Radiation

Thick-film lithography using laser write

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