JOURNAL ARTICLE

Thick-film lithography using laser write

Yao ChengTzu‐Hsuan HuangChing‐Chang Chieng

Year: 2002 Journal:   Microsystem Technologies Vol: 9 (1-2)Pages: 17-22   Publisher: Springer Science+Business Media
Keywords:
Lithography Materials science Laser Maskless lithography Extreme ultraviolet lithography Optics Optoelectronics Nanotechnology Resist Physics Electron-beam lithography

Metrics

10
Cited By
0.31
FWCI (Field Weighted Citation Impact)
7
Refs
0.61
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advancements in Photolithography Techniques
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Advanced X-ray Imaging Techniques
Physical Sciences →  Physics and Astronomy →  Radiation

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