Thick Resist Lithography

BOOK-CHAPTER

Year: 2008 Pages: 2073-2079

DOI: 10.1007/978-0-387-48998-8_1589

Keywords:

Resist Lithography Materials science Nanotechnology Optoelectronics

Metrics

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FWCI (Field Weighted Citation Impact)

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0.55

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Advancements in Photolithography Techniques

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

3D IC and TSV technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering