Microfluidic Devices Fabricated by LTCC Combined with Thick Film Lithography

Abstract

Low temperature co-fired ceramic (LTCC) process combined with thick film photolithography was employed to fabricate ceramic-based microfluidic devices. To check the applicability of novel process, three types of passive mixers, diffusion-driven T-type mixers with different channel width and convection-driven chaotic mixer, were fabricated and their microfluidic performance was evaluated. It was confirmed that the degree of mixing in ceramic-based microfluidic passive mixers was well matched with the numerical simulation data.