JOURNAL ARTICLE
Plasma deposited polycrystalline silicon films
Year: 1981 Journal: Microelectronics Journal Vol: 12 (5)Pages: 41-41 Publisher: Elsevier BV
Keywords:
Polycrystalline silicon Materials science Silicon Plasma Crystallite Engineering physics Optoelectronics Composite material Metallurgy Engineering Thin-film transistor Physics Nuclear physics Layer (electronics)
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Topics
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences → Materials Science → Materials Chemistry
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