JOURNAL ARTICLE
Plasma deposited polycrystalline silicon films
Year: 1980 Journal: Microelectronics Reliability Vol: 20 (6)Pages: 911-912 Publisher: Elsevier BV
Keywords:
Polycrystalline silicon Crystallite Plasma Silicon Materials science Optoelectronics Composite material Metallurgy Physics Thin-film transistor Nuclear physics Layer (electronics)
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Topics
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences → Materials Science → Materials Chemistry
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