JOURNAL ARTICLE
Chemically vapor deposited polycrystalline-silicon films
Year: 1975 Journal: Microelectronics Reliability Vol: 14 (4)Pages: 344-345 Publisher: Elsevier BV
Keywords:
Polycrystalline silicon Silicon Materials science Crystallite Optoelectronics Chemical vapor deposition Nanotechnology Engineering physics Chemical engineering Engineering Metallurgy Thin-film transistor Layer (electronics)
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Topics
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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