JOURNAL ARTICLE

Chemically vapor deposited polycrystalline-silicon films

Year: 1975 Journal:   Microelectronics Reliability Vol: 14 (4)Pages: 344-345   Publisher: Elsevier BV
Keywords:
Polycrystalline silicon Silicon Materials science Crystallite Optoelectronics Chemical vapor deposition Nanotechnology Engineering physics Chemical engineering Engineering Metallurgy Thin-film transistor Layer (electronics)

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Topics

Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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