High Aspect Ratio Si Etching

BOOK-CHAPTER

Year: 2008 Pages: 792-792

DOI: 10.1007/978-0-387-48998-8_643

Keywords:

Etching (microfabrication) Materials science Aspect ratio (aeronautics) Nanotechnology Optoelectronics

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Integrated Circuits and Semiconductor Failure Analysis

Physical Sciences → Engineering → Electrical and Electronic Engineering

VLSI and Analog Circuit Testing

Physical Sciences → Computer Science → Hardware and Architecture

3D IC and TSV technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering