BOOK-CHAPTER
Development of a non-contact post-CMP cleaning process for copper
Year: 2006 Pages: 135-152
Keywords:
Copper Process (computing) Materials science Metallurgy Computer science Operating system
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Refs
0.42
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Citation History
Topics
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Advanced Machining and Optimization Techniques
Physical Sciences → Engineering → Electrical and Electronic Engineering
Copper Interconnects and Reliability
Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials
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