JOURNAL ARTICLE
Capless annealing of silicon implanted gallium arsenide
Year: 1983 Journal: Microelectronics Reliability Vol: 23 (6)Pages: 1186-1186 Publisher: Elsevier BV
Keywords:
Gallium arsenide Annealing (glass) Silicon Materials science Gallium Optoelectronics Ion implantation Ion Metallurgy Chemistry
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Topics
Semiconductor materials and interfaces
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Silicon and Solar Cell Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences → Materials Science → Materials Chemistry
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