JOURNAL ARTICLE

Capless annealing of silicon implanted gallium arsenide

Year: 1983 Journal:   Microelectronics Reliability Vol: 23 (6)Pages: 1186-1186   Publisher: Elsevier BV
Keywords:
Gallium arsenide Annealing (glass) Silicon Materials science Gallium Optoelectronics Ion implantation Ion Metallurgy Chemistry

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Topics

Semiconductor materials and interfaces
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Silicon and Solar Cell Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences →  Materials Science →  Materials Chemistry

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