Modeling and Optimization of Comb Electrodes Capacitive Three-Dimensional Force Tactile Sensor

Abstract

This paper establishes an accurate model of three-dimensional force sensor through the Schwarz-Christoffel transformation, figures out its influencing factors of the linearity by analyzing the electric field of the comb electrodes capacitor, and gives the optimization based on the tangential sensitivity and linearity. With the multi-objective optimization algorithm NSGA2, the comb width of the sensor and the distance between the upper and lower plates are optimized. The credibility of the model and the optimization results were verified by finite element method. The results show that the proposed sensor model is more accurate than the existing models, and the comprehensive performance of the optimized sensor is significantly increased compared with sensors of other sizes.