Capacitive Tactile Sensor with Concentric-Shape Electrodes for Three-Axial Force Measurement

Abstract

In this paper, a novel capacitive tactile sensing device has proposed and demonstrated to solve coupling problem within the normal force and shear force by the unique design of electrode shape. In addition, the tactile sensor was added in the measuring capability of torsion sensing compared with traditional capacitive sensor. The perceptive unit of tactile sensor, which was consist of five sensing electrodes to detect three-axial force. The complete tactile sensor composed of a top electrode, a bottom electrode, and a spacer layer. Each capacitive sensing unit comprised a pair of the concentric-shape but different size electrodes (top electrode and bottom electrode). In the future, the proposed tactile sensor can be utilized in the wearable devices, flexible interface, and bionic robotic skins.