JOURNAL ARTICLE

Flexible Capacitive Tactile Sensor Array With Truncated Pyramids as Dielectric Layer for Three-Axis Force Measurement

Guanhao LiangYancheng WangDeqing MeiKailun XiZichen Chen

Year: 2015 Journal:   Journal of Microelectromechanical Systems Vol: 24 (5)Pages: 1510-1519   Publisher: Institute of Electrical and Electronics Engineers

Abstract

This paper presents a flexible capacitive tactile sensor array embedded with a truncated polydimethylsiloxane pyramid array as a dielectric layer. The proposed sensor array has been fabricated with 4 × 4 sensor units. The measurement ranges of forces in the x-axis, y-axis, and z-axis are 0-0.5, 0-0.5, and 0-4 N, respectively. In the range of 0-0.5 N, the sensitivities of the sensor unit are 58.3%/N, 57.4%/N, and 67.2%/N in the x-axis, y-axis, and z-axis, respectively. In the range of 0.5-4 N, the sensitivity in the z-axis is 7.7%/N. Three-axis force measurement has been conducted for all the sensor units. The average errors between the applied and calculated forces are 11.8% ± 6.4%. The sensor array has been mounted on a prosthetic hand. A paper cup and a cube are grasped by the prosthetic hand and the three-axis contact force is measured in real time by the sensor array. Results show that the sensor can capture the three-axis contact force image both in light and tight grasping. The proposed capacitive tactile sensor array can be utilized in robotics and prosthetic hand applications.

Keywords:
Capacitive sensing Tactile sensor Sensor array Contact force Materials science Acoustics Polydimethylsiloxane Optics Optoelectronics Electrical engineering Computer science Physics Artificial intelligence Engineering Robot Nanotechnology

Metrics

175
Cited By
7.15
FWCI (Field Weighted Citation Impact)
20
Refs
0.98
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced Sensor and Energy Harvesting Materials
Physical Sciences →  Engineering →  Biomedical Engineering
Muscle activation and electromyography studies
Physical Sciences →  Engineering →  Biomedical Engineering
Tactile and Sensory Interactions
Life Sciences →  Neuroscience →  Cognitive Neuroscience
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