Three Dimensional Capacitive Force Sensor for Tactile Applications

Abstract

A three dimensional capacitive force sensor for tactile applications has been presented. In order to better understand its capabilities, the different technologies developed in order to achieve tactile sensors have been reviewed. In this way, electromagnetic, piezoelectric, resistive and piezoresistive based tactile sensors have been discussed. Finally, the three dimensional capacitive force sensor has been presented. In a first stage, the theoretical description of the sensor has been developed through the simulation of the sensor response to forces applied along different directions. Finally, the readout electronics for capacitive sensors in general and for the three dimensional capacitive sensor has been shown. As a conclusion, capacitive sensors allow an easy and low-cost fabrication of a flexible and precise three-dimensional force sensor suitable for tactile applications.