JOURNAL ARTICLE
Modeling and Optimization of MEMS Comb-Type Capacitive Acceleration Sensor
Paing Soe ThuВ. В. КалугинE. S. Kochurina
Year: 2024 Journal: Russian Microelectronics Vol: 53 (7)Pages: 744-748 Publisher: Pleiades Publishing
Keywords:
Microelectromechanical systems Capacitive sensing Acceleration Materials science Computer science Optoelectronics Physics
Metrics
1
Cited By
0.37
FWCI (Field Weighted Citation Impact)
4
Refs
0.60
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Photonic and Optical Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
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