A metal lift-off process through hyperbolic undercut of laser heat-mode lithography

Zhengwei Wang; Kui Zhang; Guodong Chen; Zhu Zhendong; Yang Wang; Jingsong Wei

doi:10.1016/j.matlet.2020.127344

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A metal lift-off process through hyperbolic undercut of laser heat-mode lithography

Zhengwei Wang Kui Zhang Guodong Chen Zhu Zhendong Yang Wang Jingsong Wei

Year: 2020 Journal: Materials Letters Vol: 264 Pages: 127344-127344 Publisher: Elsevier BV

DOI: 10.1016/j.matlet.2020.127344

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Keywords:

Undercut Materials science Lithography Lift (data mining) Laser Maskless lithography Photolithography Fabrication Optics Optoelectronics Electron-beam lithography Resist Composite material Layer (electronics) Computer science

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Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Adhesion, Friction, and Surface Interactions

Physical Sciences → Engineering → Mechanics of Materials

A metal lift-off process through hyperbolic undercut of laser heat-mode lithography

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