JOURNAL ARTICLE

A metal lift-off process through hyperbolic undercut of laser heat-mode lithography

Keywords:
Undercut Materials science Lithography Lift (data mining) Laser Maskless lithography Photolithography Fabrication Optics Optoelectronics Electron-beam lithography Resist Composite material Layer (electronics) Computer science

Metrics

12
Cited By
0.75
FWCI (Field Weighted Citation Impact)
11
Refs
0.65
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Adhesion, Friction, and Surface Interactions
Physical Sciences →  Engineering →  Mechanics of Materials

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