Short Review on Maskless Lithography in Microfluidics

Abstract

Maskless lithography is a part of the overall microfabrication technique to fabricate the polymer based microfluidic devices. Polymer based microfluidic devices are fabricated using the polymethylmethacrylate (PMMA) and SU-8 as two commonly used polymers. PMMA microfluidic devices are fabricated by the maskless lithography, hot embossing lithography and direct bonding technique. SU-8 based glass microfluidic devices are fabricated by the maskless lithography, and indirect bonding technique. Therefore, maskless lithography is proved to be a suitable technique to fabricate the microfluidic devices for bioengineering applications.