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Low-pressure Metalorganic Chemical Vapor Deposition and Characterization of YBa2Cu3O7−x Thin Films

Keywords:
Metalorganic vapour phase epitaxy Chemical vapor deposition Materials science Analytical Chemistry (journal) Thin film Torr Annealing (glass) Partial pressure Hybrid physical-chemical vapor deposition Combustion chemical vapor deposition Mineralogy Carbon film Oxygen Epitaxy Chemistry Nanotechnology Metallurgy Layer (electronics)

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Topics

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Physical Sciences →  Physics and Astronomy →  Condensed Matter Physics
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