Low Temperature Fabrication Of YBa2Cu3O7−x High-Tc Superconducting Thin Films By Plasma-Enhanced Metalorganic Chemical Vapor Deposition

Jing Zhao; D. W. Noh; C. S. Chern; Y. Q. Li; P. Norris; B. Gallois; B. H. Kear

doi:10.1007/978-1-4684-1345-8_32

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Low Temperature Fabrication Of YBa2Cu3O7−x High-Tc Superconducting Thin Films By Plasma-Enhanced Metalorganic Chemical Vapor Deposition

Jing Zhao D. W. Noh C. S. Chern Y. Q. Li P. Norris B. Gallois B. H. Kear

Year: 1990 Pages: 217-222

DOI: 10.1007/978-1-4684-1345-8_32

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Keywords:

Sapphire Fabrication Materials science Chemical vapor deposition Thin film Superconductivity Deposition (geology) High-temperature superconductivity Optoelectronics Oxide Nanotechnology Chemical engineering Condensed matter physics Metallurgy Optics

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Physics of Superconductivity and Magnetism

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Low Temperature Fabrication Of YBa2Cu3O7−x High-Tc Superconducting Thin Films By Plasma-Enhanced Metalorganic Chemical Vapor Deposition

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