P‐21: Three‐Mask Elevated‐Metal Metal‐Oxide Thin‐Film Transistor Technology for High‐Resolution AMOLED Application

Abstract

Incorporated with the self‐aligned definition of the active island, a one‐mask‐reduced elevated‐metal metal‐oxide (EMMO) thin‐film transistor (TFT) with thermally‐induced source/drain regions was proposed for high‐resolution AMOLED application. Such three‐mask EMMO TFT combines the advantages of small device footprint, low manufacture cost, reduced overlap parasitic capacitance and good device characteristics.