Orientational control of CeO2 films on sapphire substrates grown by magnetron sputtering

Shunya Yamamoto; M. Sugimoto; Hiroshi Koshikawa; Teruyuki Hakoda; Tetsuya Yamaki

doi:10.1016/j.jcrysgro.2016.12.038

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Orientational control of CeO2 films on sapphire substrates grown by magnetron sputtering

Shunya Yamamoto M. Sugimoto Hiroshi Koshikawa Teruyuki Hakoda Tetsuya Yamaki

Year: 2016 Journal: Journal of Crystal Growth Vol: 468 Pages: 262-267 Publisher: Elsevier BV

DOI: 10.1016/j.jcrysgro.2016.12.038

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Keywords:

Sapphire Crystallinity Annealing (glass) Materials science Sputter deposition Cerium Sputtering Analytical Chemistry (journal) Thin film Diffraction Cavity magnetron Rutherford backscattering spectrometry Optics Chemistry Composite material Nanotechnology Metallurgy

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Catalytic Processes in Materials Science

Physical Sciences → Materials Science → Materials Chemistry

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Orientational control of CeO2 films on sapphire substrates grown by magnetron sputtering

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