RF magnetron sputtering of CeO2 films

JOURNAL ARTICLE

Year: 2018

Keywords:

Sputter deposition Materials science High-power impulse magnetron sputtering Cavity magnetron Sputtering Thin film Nanotechnology

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0.31

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Catalytic Processes in Materials Science

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering