Controlling the texture of CeO2 films by room temperature RF magnetron sputtering

Ha-Yong Lee; Sun Il Kim; Young‐Pyo Hong; Young‐Cheol Lee; Yong-Hwan Park; Kyung-Hyun Ko

doi:10.1016/s0257-8972(03)00387-6

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Controlling the texture of CeO2 films by room temperature RF magnetron sputtering

Ha-Yong Lee Sun Il Kim Young‐Pyo Hong Young‐Cheol Lee Yong-Hwan Park Kyung-Hyun Ko

Year: 2003 Journal: Surface and Coatings Technology Vol: 173 (2-3)Pages: 224-228 Publisher: Elsevier BV

DOI: 10.1016/s0257-8972(03)00387-6

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Keywords:

Materials science Texture (cosmology) Sputtering Crystallinity Sputter deposition Substrate (aquarium) Deposition (geology) Thin film Pole figure Cavity magnetron Composite material Nanotechnology

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Catalytic Processes in Materials Science

Physical Sciences → Materials Science → Materials Chemistry

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Controlling the texture of CeO2 films by room temperature RF magnetron sputtering

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