Effects of sapphire substrates surface treatment on the ZnO thin films grown by magnetron sputtering

Yinzhen Wang; Benli Chu

doi:10.1016/j.physb.2007.11.003

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Effects of sapphire substrates surface treatment on the ZnO thin films grown by magnetron sputtering

Yinzhen Wang Benli Chu

Year: 2007 Journal: Physica B Condensed Matter Vol: 403 (12)Pages: 1979-1982 Publisher: Elsevier BV

DOI: 10.1016/j.physb.2007.11.003

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Keywords:

Sapphire Materials science Photoluminescence Thin film Substrate (aquarium) Full width at half maximum Diffraction Sputter deposition Sputtering Crystal (programming language) Isotropic etching Etching (microfabrication) Analytical Chemistry (journal) Optoelectronics Optics Nanotechnology Chemistry Layer (electronics) Laser

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Ga2O3 and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Effects of sapphire substrates surface treatment on the ZnO thin films grown by magnetron sputtering

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