JOURNAL ARTICLE

Effects of sapphire substrates surface treatment on the ZnO thin films grown by magnetron sputtering

Yinzhen WangBenli Chu

Year: 2007 Journal:   Physica B Condensed Matter Vol: 403 (12)Pages: 1979-1982   Publisher: Elsevier BV
Keywords:
Sapphire Materials science Photoluminescence Thin film Substrate (aquarium) Full width at half maximum Diffraction Sputter deposition Sputtering Crystal (programming language) Isotropic etching Etching (microfabrication) Analytical Chemistry (journal) Optoelectronics Optics Nanotechnology Chemistry Layer (electronics) Laser

Metrics

11
Cited By
0.54
FWCI (Field Weighted Citation Impact)
14
Refs
0.63
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

ZnO doping and properties
Physical Sciences →  Materials Science →  Materials Chemistry
Ga2O3 and related materials
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
Gas Sensing Nanomaterials and Sensors
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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