Effect of grain-size on the ethanol vapor sensing properties of room-temperature sputtered ZnO thin films

Athanasios Tamvakos; Davide Calestani; Dimitrios Tamvakos; R. Mosca; D. Pullini; Alina Prună

doi:10.1007/s00604-015-1539-z

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Effect of grain-size on the ethanol vapor sensing properties of room-temperature sputtered ZnO thin films

Athanasios Tamvakos Davide Calestani Dimitrios Tamvakos R. Mosca D. Pullini Alina Prună

Year: 2015 Journal: Microchimica Acta Vol: 182 (11-12)Pages: 1991-1999 Publisher: Springer Science+Business Media

DOI: 10.1007/s00604-015-1539-z

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Keywords:

Grain size Materials science Thin film Sputter deposition Sputtering Analytical Chemistry (journal) Operating temperature Cavity magnetron Detection limit Ethanol Nanotechnology Chemistry Composite material Chromatography Electrical engineering Organic chemistry

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

Effect of grain-size on the ethanol vapor sensing properties of room-temperature sputtered ZnO thin films

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