Improved ethanol vapor sensing properties of sputtered ZnO films by doping Ta

Xu Huang; Cuiping Li; Lirong Qian; Mingji Li; Hongji Li; Xuechen Niu; Baohe Yang

doi:10.1016/j.mtcomm.2019.100680

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Improved ethanol vapor sensing properties of sputtered ZnO films by doping Ta

Xu Huang Cuiping Li Lirong Qian Mingji Li Hongji Li Xuechen Niu Baohe Yang

Year: 2019 Journal: Materials Today Communications Vol: 21 Pages: 100680-100680 Publisher: Elsevier BV

DOI: 10.1016/j.mtcomm.2019.100680

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Keywords:

Materials science Dopant Doping Sputter deposition Selectivity Sputtering Chemical engineering Grain size Analytical Chemistry (journal) Thin film Metallurgy Nanotechnology Optoelectronics Organic chemistry

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Improved ethanol vapor sensing properties of sputtered ZnO films by doping Ta

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