Room temperature NO2 sensing properties of reactively sputtered TeO2 thin films

Tiziana Siciliano; Massimo Di Giulio; M. Tepore; Emanuela Filippo; G. Micocci; A. Tepore

doi:10.1016/j.snb.2008.12.004

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Room temperature NO2 sensing properties of reactively sputtered TeO2 thin films

Tiziana Siciliano Massimo Di Giulio M. Tepore Emanuela Filippo G. Micocci A. Tepore

Year: 2008 Journal: Sensors and Actuators B Chemical Vol: 137 (2)Pages: 644-648 Publisher: Elsevier BV

DOI: 10.1016/j.snb.2008.12.004

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Keywords:

Materials science Thin film Amorphous solid Analytical Chemistry (journal) Annealing (glass) Sputtering Raman spectroscopy Band gap Transmittance Quartz Sputter deposition Optics Optoelectronics Nanotechnology Chemistry Composite material Crystallography

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Transition Metal Oxide Nanomaterials

Physical Sciences → Materials Science → Polymers and Plastics

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

Room temperature NO2 sensing properties of reactively sputtered TeO2 thin films

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