JOURNAL ARTICLE
Detailed Study of Reactively Sputtered ScN Thin Films at Room Temperature
Susmita ChowdhuryRachana GuptaParasmani RajputAkhil TayalDheemahi RaoReddy SekharShashi PrakashR. RamaseshanS. N. JhaBivas SahaMukul Gupta
Year: 2021 Journal: SSRN Electronic Journal Publisher: RELX Group (Netherlands)
Keywords:
Materials science Thin film Nanotechnology
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Citation History
Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
Thermal and Kinetic Analysis
Physical Sciences → Materials Science → Materials Chemistry
Intermetallics and Advanced Alloy Properties
Physical Sciences → Engineering → Mechanical Engineering
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