JOURNAL ARTICLE

Detailed Study of Reactively Sputtered ScN Thin Films at Room Temperature

Keywords:
Materials science Thin film Nanotechnology

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Citation History

Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Thermal and Kinetic Analysis
Physical Sciences →  Materials Science →  Materials Chemistry
Intermetallics and Advanced Alloy Properties
Physical Sciences →  Engineering →  Mechanical Engineering

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