Enhanced, selective, and room temperature detection of ethanol vapor by RF-sputtered TiO2 thin films

K. Khojier; S. Goudarzi; M. Firouzi

doi:10.1007/s00339-023-07089-9

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Enhanced, selective, and room temperature detection of ethanol vapor by RF-sputtered TiO2 thin films

K. Khojier S. Goudarzi M. Firouzi

Year: 2023 Journal: Applied Physics A Vol: 129 (12) Publisher: Springer Science+Business Media

DOI: 10.1007/s00339-023-07089-9

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Keywords:

Anatase Sputtering Materials science Tetragonal crystal system Thin film Sputter deposition Analytical Chemistry (journal) Rutile Phase (matter) Scanning electron microscope Optoelectronics Nanotechnology Chemistry Composite material

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

Advanced Chemical Sensor Technologies

Physical Sciences → Engineering → Biomedical Engineering

Enhanced, selective, and room temperature detection of ethanol vapor by RF-sputtered TiO2 thin films

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