Novel touch mode capacitive pressure sensor based on SiC

Abstract

The advantages of touch mode of operation are near linear output, large over-range pressure and robust structure. And Silicon Carbide (SiC) is a promising material for the device operating in harsh environments. In this paper, a novel touch mode pressure sensor based on SiC is presented, and the process is illustrated detailedly. Based on the calculation and Finite Element Analysis, the structure parameters of the sensor are designed detailedly.