JOURNAL ARTICLE
Three electrodes touch-mode capacitive pressure sensor
K.-M. ChangG.J. HwangY.-L. Hsien
Year: 1998 Journal: Microsystem Technologies Vol: 5 (2)Pages: 93-99 Publisher: Springer Science+Business Media
Keywords:
Capacitive sensing Electrode Capacitor Sensitivity (control systems) Materials science Pressure sensor Fabrication Planar Optoelectronics Voltage Electrical engineering Pressure measurement Acoustics Electronic engineering Computer science Engineering Physics Mechanical engineering
Metrics
2
Cited By
0.00
FWCI (Field Weighted Citation Impact)
0
Refs
0.14
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced Sensor and Energy Harvesting Materials
Physical Sciences → Engineering → Biomedical Engineering
Sensor Technology and Measurement Systems
Physical Sciences → Computer Science → Computer Networks and Communications
Tactile and Sensory Interactions
Life Sciences → Neuroscience → Cognitive Neuroscience
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