Surface-micromachined double-sided touch mode capacitive pressure sensor

Abstract

Double sided touch mode capacitive pressure sensor offered better performance than that of single sided one. Double-sided touch mode capacitive pressure sensor almost has the same character of the single sided one, which can be divided into four regions (normal region, transition region, linear region, saturation region). In the linear region, the diaphragm of the capacitive pressure sensor touches the substrate structure in operation range. The advantage of the double-sided capacitive pressure sensor of operation is near linear output characteristics, large over range pressure and robust structure. It has not only the advantage of the single sided one, but also higher sensitivity and more dependable without increasing the fabrication significantly, this is what really counts. The principle, design and fabrication process of double sided touch mode capacitive pressure sensor are discussed in this paper.