JOURNAL ARTICLE
Non-Contact Post Cu CMP Cleaning Using Megasonic Energy
Wim FyenJeffrey M. LauerhaasIngrid VosMarc MeurisPaul MertensMarc Heyns
Year: 2001 Journal: Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena Vol: 76-77 Pages: 39-42 Publisher: Scientific.net
Keywords:
Materials science Energy (signal processing) Metallurgy Engineering physics Composite material Forensic engineering
Metrics
4
Cited By
0.33
FWCI (Field Weighted Citation Impact)
0
Refs
0.65
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Advanced Machining and Optimization Techniques
Physical Sciences → Engineering → Electrical and Electronic Engineering
Nanofabrication and Lithography Techniques
Physical Sciences → Engineering → Biomedical Engineering
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