JOURNAL ARTICLE

Apparatus for uniform cleaning of wafers using megasonic energy

David Stanasolovich

Year: 1997 Journal:   The Journal of the Acoustical Society of America Vol: 102 (4)Pages: 1923-1923   Publisher: Acoustical Society of America
Keywords:
Wafer Energy (signal processing) Materials science Acoustics Environmental science Optoelectronics Physics Mathematics Statistics

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Topics

Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering

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