JOURNAL ARTICLE
Apparatus for uniform cleaning of wafers using megasonic energy
Year: 1997 Journal: The Journal of the Acoustical Society of America Vol: 102 (4)Pages: 1923-1923 Publisher: Acoustical Society of America
Keywords:
Wafer Energy (signal processing) Materials science Acoustics Environmental science Optoelectronics Physics Mathematics Statistics
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Topics
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
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