Segmented uniform energy megasonic transducer

Mark Beck

doi:10.1121/1.2185013

ScienceGate Book Chapters

JOURNAL ARTICLE

Segmented uniform energy megasonic transducer

Mark Beck

Year: 2006 Journal: The Journal of the Acoustical Society of America Vol: 119 (3)Pages: 1299-1299 Publisher: Acoustical Society of America

DOI: 10.1121/1.2185013

Get Full-Text PDF Get Analytical Report

Keywords:

Transducer Acoustics Energy (signal processing) Materials science Physics

Metrics

Cited By

0.00

FWCI (Field Weighted Citation Impact)

Refs

0.46

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Topics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Geophysics and Sensor Technology

Physical Sciences → Engineering → Ocean Engineering

Sensor Technology and Measurement Systems

Physical Sciences → Computer Science → Computer Networks and Communications

Segmented uniform energy megasonic transducer

Metrics

Topics

Related Documents

Wedge shaped uniform energy megasonic transducer

Megasonic transducer with focused energy resonator

Megasonic transducer for cleaning substrates

Apparatus for uniform cleaning of wafers using megasonic energy

Impedance Characteristic of Megasonic Transducer Operated as Inverter Load.