JOURNAL ARTICLE
Realization and Simulation of High-Aspect-Ratio Micro/Nanostructures by Proton Beam Writing
E. ValamontesMargarita ChatzichristidiΝ. ΤσικρικάςD. GoustouridisI. RaptisC. PotiriadisJ.A. van KanF. Watt
Year: 2008 Journal: Japanese Journal of Applied Physics Vol: 47 (11R)Pages: 8600-8600 Publisher: Institute of Physics
Abstract
10.1143/JJAP.47.8600
Keywords:
Resist Laser linewidth Aspect ratio (aeronautics) Realization (probability) Materials science Nanoscopic scale Proton Nanotechnology Nanostructure Beam (structure) Base (topology) Optoelectronics Optics Laser Physics
Metrics
9
Cited By
0.57
FWCI (Field Weighted Citation Impact)
13
Refs
0.74
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advancements in Photolithography Techniques
Physical Sciences → Engineering → Electrical and Electronic Engineering
Particle accelerators and beam dynamics
Physical Sciences → Engineering → Aerospace Engineering
Electron and X-Ray Spectroscopy Techniques
Physical Sciences → Materials Science → Surfaces, Coatings and Films
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