Realization and simulation of high aspect ratio micro/nano structures by proton beam writing

M. Chatzichristidi; E. Valamontes; I. Raptis; J.A. van Kan; F. Watt

doi:10.1109/imnc.2007.4456283

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Realization and simulation of high aspect ratio micro/nano structures by proton beam writing

M. Chatzichristidi E. Valamontes I. Raptis J.A. van Kan F. Watt

Year: 2007 Vol: 6 Pages: 420-421

DOI: 10.1109/imnc.2007.4456283

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Abstract

10.1109/IMNC.2007.4456283

Keywords:

Resist Laser linewidth Realization (probability) Materials science Proton Aspect ratio (aeronautics) Nano- Beam (structure) Epoxy Aqueous solution Monte Carlo method Optics Composite material Chemistry Physics Nuclear physics Laser Organic chemistry Mathematics

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Realization and simulation of high aspect ratio micro/nano structures by proton beam writing

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