JOURNAL ARTICLE

Realization and simulation of high aspect ratio micro/nano structures by proton beam writing

Abstract

10.1109/IMNC.2007.4456283

Keywords:
Resist Laser linewidth Realization (probability) Materials science Proton Aspect ratio (aeronautics) Nano- Beam (structure) Epoxy Aqueous solution Monte Carlo method Optics Composite material Chemistry Physics Nuclear physics Laser Organic chemistry Mathematics

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Topics

Advancements in Photolithography Techniques
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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