Deep proton writing of high aspect ratio SU-8 micro-pillars on glass

Evert Ebraert; Ben Rwamucyo; Hugo Thienpont; Jürgen Van Erps

doi:10.1016/j.nimb.2016.11.014

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Deep proton writing of high aspect ratio SU-8 micro-pillars on glass

Evert Ebraert Ben Rwamucyo Hugo Thienpont Jürgen Van Erps

Year: 2016 Journal: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Vol: 389-390 Pages: 5-12 Publisher: Elsevier BV

DOI: 10.1016/j.nimb.2016.11.014

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Keywords:

Materials science Fabrication Optical fiber Silicone Irradiation Casting Fiber Optics Composite material Optoelectronics

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Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering

Microfluidic and Capillary Electrophoresis Applications

Physical Sciences → Engineering → Biomedical Engineering

Advancements in Photolithography Techniques

Physical Sciences → Engineering → Electrical and Electronic Engineering

Deep proton writing of high aspect ratio SU-8 micro-pillars on glass

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