JOURNAL ARTICLE

Deep proton writing of high aspect ratio SU-8 micro-pillars on glass

Evert EbraertBen RwamucyoHugo ThienpontJürgen Van Erps

Year: 2016 Journal:   Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Vol: 389-390 Pages: 5-12   Publisher: Elsevier BV
Keywords:
Materials science Fabrication Optical fiber Silicone Irradiation Casting Fiber Optics Composite material Optoelectronics

Metrics

4
Cited By
0.34
FWCI (Field Weighted Citation Impact)
42
Refs
0.66
Citation Normalized Percentile
Is in top 1%
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Citation History

Topics

Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Microfluidic and Capillary Electrophoresis Applications
Physical Sciences →  Engineering →  Biomedical Engineering
Advancements in Photolithography Techniques
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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