Micromachining of thin 3C-SiC films for mechanical properties investigation

Jean-François Michaud; Sai Jiao; Anne-Elisabeth Bazin; Marc Portail; Thierry Chassagne; Marcin Zieliński; Daniel Alquier

doi:10.1557/proc-1246-b09-04

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Micromachining of thin 3C-SiC films for mechanical properties investigation

Jean-François Michaud Sai Jiao Anne-Elisabeth Bazin Marc Portail Thierry Chassagne Marcin Zieliński Daniel Alquier

Year: 2010 Journal: MRS Proceedings Vol: 1246 Publisher: Cambridge University Press

DOI: 10.1557/proc-1246-b09-04

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Keywords:

Materials science Cantilever Silicon carbide Nanoindentation Composite material Modulus Thin film Deflection (physics) Bulk micromachining Silicon Diffraction Surface micromachining Optoelectronics Optics Nanotechnology

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Silicon Carbide Semiconductor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Micromachining of thin 3C-SiC films for mechanical properties investigation

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